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MKS Instruments 626A01TDE Range 133.32Pa Vacuum Gauge Module

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The MKS Instruments 626A01TDE vacuum gauge module is designed for precise measurement of pressures down to 133.32 Pa, ideal for semiconductor processing, laboratory testing, and other applications requiring high accuracy and reliability.

Sensor Type:Capacitive

Pressure Range (Pa):133.32

Operating Temperature (°C):-40 to +150

Accuracy (%F.S.):+/-0.1%

Output Signal (V):0.5 to 4.5

Process Connection (mm):1/4 NPT

Electrical Connection:2-wire

    The MKS 626A01TDE pressure sensor boasts a compact design specifically engineered for low-pressure vacuum applications. Its capacitive technology ensures exceptional measurement accuracy, even under extreme temperature fluctuations ranging from -40°C to +150°C.

    Equipped with a robust 1/4 NPT process connection, this sensor seamlessly integrates into various industrial systems, offering versatile compatibility with existing setups. Its 2-wire electrical connection simplifies installation and maintenance, minimizing downtime and maximizing operational efficiency.

    Engineered for long-term reliability, the MKS 626A01TDE pressure sensor features a ±0.1% full-scale accuracy, ensuring precise readings over its specified range of 133.32 Pa. This precision is critical for industries requiring meticulous control over vacuum conditions, such as semiconductor manufacturing, cleanroom operations, and scientific research.

    Innovative self-calibration features within the sensor maintain accuracy over time, reducing the need for frequent recalibration and saving on maintenance costs. The user-friendly interface allows for easy setup and adjustment, catering to both novice and experienced technicians alike.

    The MKS 626A01TDE pressure sensor is made from high-quality materials, combining durability with precision engineering. It is designed to withstand harsh environmental conditions, ensuring reliable performance in diverse industrial settings. With its combination of advanced technology and practical features, this sensor represents an excellent investment for enhancing operational efficiency and precision in vacuum control applications.

MKS 626A01TDE RANGE 133.32Pa




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